Fracture strength of SOI springs in MEMS micromirrors

Fracture strength of SOI springs in MEMS micromirrors

Author(s):

S.-T. Hsu ( Fraunhofer Institute for Photonic Microsystems (Germany) )
A. Wolter ( HiperScan (Germany) )
W.-D. Owe ( Fraunhofer Institute for Photonic Microsystems (Germany) )
H. Schenk ( Fraunhofer Institute for Photonic Microsystems (Germany) )

Publication title:

MOEMS and miniaturized systems VI : 24-25 January 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6466

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465795 [0819465798]

Language:

English

Call no.:

P63600/6466

Type:

Conference Proceedings

Details

TDL ID:	ZA00046774
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
Conf. info. (Number):	2007 : 6th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.01.24-2007.01.25

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