Electrostatic 1D microscanner with vertical combs for HD resolution display

Electrostatic 1D microscanner with vertical combs for HD resolution display

Author(s):

J.-W. Cho ( Samsung Advanced Institute of Technology (South Korea) )

Y.-H. Park ( Samsung Advanced Institute of Technology (South Korea) )

Y.-C. Ko ( Samsung Advanced Institute of Technology (South Korea) )

B.-L. Lee ( Samsung Advanced Institute of Technology (South Korea) )

S.-J. Kang ( Samsung Advanced Institute of Technology (South Korea) )

S.-W. Chung ( Samsung Advanced Institute of Technology (South Korea) )

W.-K. Choi ( Samsung Advanced Institute of Technology (South Korea) )

Y.-C. Cho ( Samsung Advanced Institute of Technology (South Korea) )

S.-M. Chang ( Samsung Advanced Institute of Technology (South Korea) )

J.-H. Lee ( Samsung Advanced Institute of Technology (South Korea) )

J. Sunu ( Samsung Advanced Institute of Technology (South Korea) )

6 more

Publication title:

MOEMS and miniaturized systems VI : 24-25 January 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6466

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465795 [0819465798]

Language:

English

Call no.:

P63600/6466

Type:

Conference Proceedings

Details

TDL ID:	ZA00046774
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
Conf. info. (Number):	2007 : 6th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2007.01.24-2007.01.25

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