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Author(s):
J.-W. Cho ( Samsung Advanced Institute of Technology (South Korea) )
Y.-H. Park ( Samsung Advanced Institute of Technology (South Korea) )
Y.-C. Ko ( Samsung Advanced Institute of Technology (South Korea) )
B.-L. Lee ( Samsung Advanced Institute of Technology (South Korea) )
S.-J. Kang ( Samsung Advanced Institute of Technology (South Korea) )
S.-W. Chung ( Samsung Advanced Institute of Technology (South Korea) )
W.-K. Choi ( Samsung Advanced Institute of Technology (South Korea) )
Y.-C. Cho ( Samsung Advanced Institute of Technology (South Korea) )
S.-M. Chang ( Samsung Advanced Institute of Technology (South Korea) )
J.-H. Lee ( Samsung Advanced Institute of Technology (South Korea) )
J. Sunu ( Samsung Advanced Institute of Technology (South Korea) )
6 more
Publication title:
MOEMS and miniaturized systems VI : 24-25 January 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6466
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465795 [0819465798]
Language:
English
Call no.:
P63600/6466
Type:
Conference Proceedings

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