Stereolithography as a meso-structure for input force reduction to a capacitive force MEMS sensor
- Author(s):
- H. K. Chu ( Univ. of Toronto (Canada) )
- J. K. Mills ( Univ. of Toronto (Canada) )
- W. L. Cleghorn ( Univ. of Toronto (Canada) )
- Publication title:
- MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6464
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465771 [0819465771]
- Language:
- English
- Call no.:
- P63600/6464
- Type:
- Conference Proceedings
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