Blank Cover Image

Stereolithography as a meso-structure for input force reduction to a capacitive force MEMS sensor

Author(s):
Publication title:
MEMS/MOEMS Components and Their Applications IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6464
Pub. date:
2007
Vol.:
6464
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465771 [0819465771]
Language:
English
Call no.:
P63600/6464
Type:
Conference Proceedings

Similar Items:

Anis, Y. H., Mills, J. K., Cleghorn, W. L.

SPIE - The International Society of Optical Engineering

J.L. Davidson, W.P. Kang, Y.M. Wong, K. Subramamium

Electrochemical Society

Hassanpour, P. A., Cleghorn, W. L., Esmailzadeh, E., Mills, J. K.

SPIE - The International Society of Optical Engineering

Salvino, L.W., Pines, D.J., Todd, M.D., Nichols, J.

SPIE-The International Society for Optical Engineering

Tse, L.A., Noh, H.-S., Seals, L., Cole, J., Rosen, D.W., Hesketh, P.J.

Electrochemical Society

Dechev, N., Cleghorn, W.L., Mills, J.K.

SPIE - The International Society of Optical Engineering

Asundi,A.K., Cheng,H.K., Toh,S.L., Tay,C.J.

SPIE-The International Society for Optical Engineering

P. A. Hassanpour, W. L. Cleghorn, E. Esmailzadeh, J. K. Mills

SPIE - The International Society of Optical Engineering

Kenny, T. W., Liang, Y., Pruitt, B. L., Harley, J. A., Bartsch, M., Rudnitsky, R.

SPIE - The International Society of Optical Engineering

P. A. Hassanpour, W. L. Cleghorn, E. Esmailzadeh, J. K. Mills

American Society of Mechanical Engineers

Cirignano, L. J., Kim, H., Shah, K., Klugerman, M., Wong, P., Squillante, M., Li, L.

SPIE - The International Society of Optical Engineering

Chu, G. T-M., Brady, G. A., Miao, W., Halloran, J. W., Hollister, S. J., Brei, D.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12