Performance and reliability test of MEMS optical scanners

Author(s):

S. Kurth ( Fraunhofer Institute for Reliability and Microintegration (Germany) )

C. Kaufmann ( Chemnitz Univ. of Technology (Germany) )

R. Hahn ( Chemnitz Univ. of Technology (Germany) )

J. Mehner ( Fraunhofer Institute for Reliability and Microintegration (Germany) )

W. Doetzel ( Chemnitz Univ. of Technology (Germany) )

T. Gessner ( Fraunhofer Institute for Reliability and Microintegration (Germany) and Chemnitz Univ. of Technology (Germany) )

1 more

Publication title:

Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6463

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465764 [0819465763]

Language:

English

Call no.:

P63600/6463

Type:

Conference Proceedings