Performance and reliability test of MEMS optical scanners
- Author(s):
S. Kurth ( Fraunhofer Institute for Reliability and Microintegration (Germany) ) C. Kaufmann ( Chemnitz Univ. of Technology (Germany) ) R. Hahn ( Chemnitz Univ. of Technology (Germany) ) J. Mehner ( Fraunhofer Institute for Reliability and Microintegration (Germany) ) W. Doetzel ( Chemnitz Univ. of Technology (Germany) ) T. Gessner ( Fraunhofer Institute for Reliability and Microintegration (Germany) and Chemnitz Univ. of Technology (Germany) ) - Publication title:
- Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6463
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465764 [0819465763]
- Language:
- English
- Call no.:
- P63600/6463
- Type:
- Conference Proceedings
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