The silicon mold fabrication of a kind of micro-optical resonator and coupler
- Author(s):
H. Ju ( Wakayama Univ. (Japan) ) T. Ohta ( Wakayama Univ. (Japan) ) S. Takao ( Wakayama Univ. (Japan) ) M. Ito ( Wakayama Univ. (Japan) ) M. Sasaki ( Tohoku Univ. (Japan) ) K. Hane ( Tohoku Univ. (Japan) ) M. Hori ( Nagoya Univ. (Japan) ) - Publication title:
- Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6462
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465757 [0819465755]
- Language:
- English
- Call no.:
- P63600/6462
- Type:
- Conference Proceedings
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