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Replication technology as a means of implementing polymer MOEMS

Author(s):
J. T. Kim ( Electronics and Telecommunications Research Institute (South Korea) )
J. J. Ju ( Electronics and Telecommunications Research Institute (South Korea) )
S. Park ( Electronics and Telecommunications Research Institute (South Korea) )
S. K. Park ( Electronics and Telecommunications Research Institute (South Korea) )
M. Kim ( Electronics and Telecommunications Research Institute (South Korea) )
H. Lee ( ChemOptics, Inc. (South Korea) )
M. Lee ( Electronics and Telecommunications Research Institute (South Korea) )
2 more
Publication title:
Micromachining technology for micro-optics and nano-optics V and microfabrication process technology XII : 22-24 January 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6462
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465757 [0819465755]
Language:
English
Call no.:
P63600/6462
Type:
Conference Proceedings

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