Hybrid micro-optical system integration by laserbeam soldering
- Author(s):
E. Beckert ( Fraunhofer IOF (Germany) ) R. Eberhardt ( Fraunhofer IOF (Germany) ) H. Banse ( Fraunhofer IOF (Germany) ) A. Tunnermann ( Fraunhofer IOF (Germany) ) F. Buchmann ( Askion GmbH (Germany) ) M. Fettke ( PacTech GmbH (Germany) ) - Publication title:
- Laser-based micro-and nanopackaging and assembly : 22-24 January 2007, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6459
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465726 [0819465720]
- Language:
- English
- Call no.:
- P63600/6459
- Type:
- Conference Proceedings
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