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Improving the optical characteristics of bimetallic grayscale photomasks

Author(s):
Publication title:
Photon processing in microelectronics and photonics VI : 22-25 January 2007, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6458
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465719 [0819465712]
Language:
English
Call no.:
P63600/6458
Type:
Conference Proceedings

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