
Subpicosecond vacuum ultraviolet laser system for advanced materials processing
- Author(s):
S. Kubodera ( Univ. of Miyazaki (Japan) ) Y. Taniguchi ( Univ. of Miyazaki (Japan) ) A. Hosotani ( Univ. of Miyazaki (Japan) ) M. Katto ( Univ. of Miyazaki (Japan) ) A. Yokotani ( Univ. of Miyazaki (Japan) ) N. Miyanaga ( Osaka Univ. (Japan) ) K. Mima ( Osaka Univ. (Japan) ) - Publication title:
- Laser resonators and beam control IX : 22-24 January, 2007, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6452
- Pub. Year:
- 2007
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465658 [0819465658]
- Language:
- English
- Call no.:
- P63600/6452
- Type:
- Conference Proceedings
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