Adhesive wafer-to-wafer bonding using contact imprinting
- Author(s):
- L. Yu ( Institute of Bioengineering and Nanotechnology (Singapore) and National Univ. of Singapore (Singapore) )
- A. J. Pang ( Institute of Bioengineering and Nanotechnology (Singapore) )
- B. Chen ( Institute of Bioengineering and Nanotechnology (Singapore) )
- F. E. H. Tay ( Institute of Bioengineering and Nanotechnology (Singapore) and National Univ. of Singapore (Singapore) )
- C. Iliescu ( Institute of Bioengineering and Nanotechnology (Singapore) )
- Publication title:
- Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6415
- Pub. Year:
- 2007
- Paper no.:
- 64151I
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465238 [0819465232]
- Language:
- English
- Call no.:
- P63600/6415
- Type:
- Conference Proceedings
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