MEMS microshutter arrays for James Webb Space Telescope

Author(s):

M. J. Li ( NASA Goddard Space Flight Ctr. (USA) )

T. Adachi ( NASA Goddard Space Flight Ctr. (USA) )

C. Allen ( NASA Goddard Space Flight Ctr. (USA) )

S. Babu ( NASA Goddard Space Flight Ctr. (USA) )

S. Bajikar ( NASA Goddard Space Flight Ctr. (USA) )

M. Beamesderfer ( NASA Goddard Space Flight Ctr. (USA) )

R. Bradley ( NASA Goddard Space Flight Ctr. (USA) )

K. Denis ( NASA Goddard Space Flight Ctr. (USA) )

N. Costen ( NASA Goddard Space Flight Ctr. (USA) )

A. Ewin ( NASA Goddard Space Flight Ctr. (USA) )

D. Franz ( NASA Goddard Space Flight Ctr. (USA) )

L. Hess ( NASA Goddard Space Flight Ctr. (USA) )

R. Hu ( NASA Goddard Space Flight Ctr. (USA) )

K. Jackson ( NASA Goddard Space Flight Ctr. (USA) )

M. Jhabvala ( NASA Goddard Space Flight Ctr. (USA) )

D. Kelly ( NASA Goddard Space Flight Ctr. (USA) )

T. King ( NASA Goddard Space Flight Ctr. (USA) )

G. Kletetschka ( NASA Goddard Space Flight Ctr. (USA) )

A. Kutyrev ( NASA Goddard Space Flight Ctr. (USA) )

B. Lynch ( NASA Goddard Space Flight Ctr. (USA) )

T. Miller ( NASA Goddard Space Flight Ctr. (USA) )

H. Moseley, Jr. ( NASA Goddard Space Flight Ctr. (USA) )

V. Mikula ( NASA Goddard Space Flight Ctr. (USA) )

B. Mott ( NASA Goddard Space Flight Ctr. (USA) )

L. Oh ( NASA Goddard Space Flight Ctr. (USA) )

J. Pontius ( NASA Goddard Space Flight Ctr. (USA) )

D. Rapchun ( NASA Goddard Space Flight Ctr. (USA) )

C. Ray ( NASA Goddard Space Flight Ctr. (USA) )

E. Schulte ( NASA Goddard Space Flight Ctr. (USA) )

S. Schwinger ( NASA Goddard Space Flight Ctr. (USA) )

P. Shu ( NASA Goddard Space Flight Ctr. (USA) )

R. Silverberg ( NASA Goddard Space Flight Ctr. (USA) )

W. Smith ( NASA Goddard Space Flight Ctr. (USA) )

S. Snodgrass ( NASA Goddard Space Flight Ctr. (USA) )

D. Sohl ( NASA Goddard Space Flight Ctr. (USA) )

L. Sparr ( NASA Goddard Space Flight Ctr. (USA) )

R. Steptoe-Jackson ( NASA Goddard Space Flight Ctr. (USA) )

V. Veronica ( NASA Goddard Space Flight Ctr. (USA) )

L. Wang ( NASA Goddard Space Flight Ctr. (USA) )

Y. Zheng ( NASA Goddard Space Flight Ctr. (USA) )

C. Zincke ( NASA Goddard Space Flight Ctr. (USA) )

36 more

Publication title:

Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6415

Pub. Year:

2007

Paper no.:

64150B

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465238 [0819465232]

Language:

English

Call no.:

P63600/6415

Type:

Conference Proceedings