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Thin silicon shadow masks for organic light-emitting diodes (OLED) deposition processes

Author(s):
Publication title:
Smart Structures, Devices, and Systems III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6414
Pub. date:
2007
Vol.:
6414
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465221 [0819465224]
Language:
English
Call no.:
P63600/6414
Type:
Conference Proceedings

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