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Image enhancement for phase shift analysis sensors

Author(s):
G. Abramovich ( General Electric Global Research (USA) )
K. Harding ( General Electric Global Research (USA) )
R. Isaacs ( General Electric QTC (USA) )
M. Radebach ( General Electric Global Research (USA) )
K. Kenny ( General Electric Global Research (USA) )
Z. Sun ( General Electric Global Research (USA) )
J. Ross ( General Electric QTC (USA) )
M. Jia ( General Electric CTC (China) )
L. Tao ( General Electric CTC (China) )
G. Song ( General Electric CTC (China) )
J. Zheng ( General Electric CTC (China) )
M. Gardner ( General Electric Global Research (USA) )
D. Padfield ( General Electric Global Research (USA) )
8 more
Publication title:
Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6382
Pub. Year:
2006
Paper no.:
63820Q
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464804 [0819464805]
Language:
English
Call no.:
P63600/6382
Type:
Conference Proceedings

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