Recent trends in white-light interferometry
- Author(s):
- K. Kitagawa ( Toray Engineering Co., Ltd. (Japan) )
- Publication title:
- Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6382
- Pub. Year:
- 2006
- Paper no.:
- 638201
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464804 [0819464805]
- Language:
- English
- Call no.:
- P63600/6382
- Type:
- Conference Proceedings
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