Microwave Activation of Exfoliation in Ion-cut Silicon Layer Transfer
- Author(s):
D.C. Thompson T.L. Alford J.W. Mayer T. Hochbauer J. K. Lee M. Nastasi N. David Theodore - Publication title:
- Semiconductor defect engineering--materials, synthetic structures and devices II : symposium held April 9-13, 2007, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 994
- Pub. Year:
- 2007
- Page(from):
- 137
- Page(to):
- 142
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558999541 [155899954X]
- Language:
- English
- Call no.:
- M23500/994
- Type:
- Conference Proceedings
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