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Current Status of LSI Micro-Fabrication and Future Prospect for 3-D System Integration

Author(s):
Kazuya Okamoto  
Publication title:
Enabling technologies for 3-D integration : symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
970
Pub. Year:
2007
Page(from):
79
Page(to):
90
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558999275 [1558999272]
Language:
English
Call no.:
M23500/970
Type:
Conference Proceedings

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