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Amorphization/Templated Recrystallization (ATR) Method for Hybrid Orientation Substrates

Author(s):
K. L. Saenger
J. P. de Souza
K. E. Fogel
J. A. Ott
A. Reznicek
C. Y. Sung
H. Yin
D. K. Sadana
3 more
Publication title:
Transistor scaling--methods, materials and modeling : symposium held April 18-19, 2006, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
913
Pub. Year:
2006
Page(from):
3
Page(to):
12
Pages:
10
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998698 [1558998691]
Language:
English
Call no.:
M23500/913
Type:
Conference Proceedings

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