Analysis and Optimization of New Implantation and Activation Mechanisms in Ultra Shallow Junction Implants Using Scanning Spreading Resistance Microscopy (SSRM)

Analysis and Optimization of New Implantation and Activation Mechanisms in Ultra Shallow Junction Implants Using Scanning Spreading Resistance Microscopy (SSRM)

Author(s):

Pierre Eyben

Publication title:

Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

912

Pub. Year:

2006

Page(from):

203

Page(to):

210

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998681 [1558998683]

Language:

English

Call no.:

M23500/912

Type:

Conference Proceedings

Details

TDL ID:	ZA00046616
Series ID:	PA00000011
Conf. info. (Name):	MRS Spring Meeting : Symposium C
Conf. info. (Number):	2006
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	2006.04.18-2006.04.19

Similar Items:

1 Conference Proceedings Enhanced Activation of Standard and Cocktail Spike Annealed Junctions With Additional Sub-Melt Laser Anneal Simone Severi, Emmanuel Augendre, Bartek J. Pawlak, Pierre Eyben, Taiji Noda, Susan Felch, Annelies Falepin, Vijay … Materials Research Society	7 Conference Proceedings Quantitative Two-Dimensional Carrier Mapping in Silicon Nanowire-Based Tunnel-Field Effect Transistors Using Scanning Spreading Resistance Microscopy Andreas Schulze, Thomas Hantschel, Pierre Eyben, Anne Vandooren, Rita Rooyackers, Jay Mody, Anne S. Verhulst, Wilfried … Materials Research Society
2 Conference Proceedings The Carbon Co-Implant With Spike RTA Solution for Boron Extension Bartek J. Pawlak, Emmanuel Augendre, Simone Severi, Pierre Eyben, Tom Janssens, Annelies Falepin, Philippe Absil, … Materials Research Society	8 Conference Proceedings Pulsed Force-Scanning Spreading Resistance Microscopy (PF-SSRM) For High Spatial Resolution 2D-Dopant Profiling Eyben, P., Fouchier, M., Albart, P., Charon-Verstappen, J., Vandervorst, W. Materials Research Society
3 Conference Proceedings The Carbon Co-Implant With Spike RTA Solution for Phosphorus Extension Bartek J. Pawlak, Ray Duffy, Emmanuel Augendre, Simone Severi, Tom Janssens, Philippe Absil, Wilfried Vandervorst, Erik … Materials Research Society	9 Conference Proceedings Integration of Solid Phase Epitaxial Re-Growth, Flash and Sub-Melt Laser Annealing for S/D Junctions in CMOS Digital Technology Simone Severi, Emmanuel Augendre, Kristin De Meyer Materials Research Society
4 Conference Proceedings Scanning Spreading Resistance Microscopy for 3D-Carrier Profiling in FinFET-Based Structures Jay Mody, Pierre Eyben, Wouter Polspoel, Malgorzata Jurczak, Wilfried Vandervorst Materials Research Society	10 Conference Proceedings Modeling Ultra Shallow Junctions Formed by Phosphorus-Carbon and Boron-Carbon Co-Implantation Christoph Zechner, Dmitri Matveev, Nikolas Zographos, Victor Moroz, Bartek Pawlak Materials Research Society
5 Conference Proceedings Ultra-Shallow Junctions Formed by Co-Implantation and Sub-Melt Laser Annealing S. B. Felch, A. Falepin, S. Seven, E. Augendre, T. Noda, V. Parihar, F. Nouri, T. Hoffinann, B. Pawlak, P. Eyben, W. … Electrochemical Society	11 Conference Proceedings Low-Leakage Ultra-Scaled Junctions in MOS Devices; from Fundamentals to Improved Device Performance R. Duffy, A. Heringa, J. Loo, E. Augendre, S. Severi, G. Curatola Electrochemical Society
6 Conference Proceedings Channel Engineering and Junction Overlap Issues for Ultra-Shallow Junctions Formed by SPER in the 45 nm CMOS Technology Node Severi, Simone, Henson, Kirklen, Lindsay, Richard, Lauwers, Anne, Pawlak, Bartek J., Surdeanu, Radu, Meyer, K.De Materials Research Society	12 Conference Proceedings Micro Probe Carrier Profiling of Ultra-Shallow Structures in Germanium Trudo Clarysse, Alain Moussa, Brigitte Parmentier, Pierre Eyben, Bastien Douhard, Wilfried Vandervorst, Peter F. … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12