Blank Cover Image

Enhanced Activation of Standard and Cocktail Spike Annealed Junctions With Additional Sub-Melt Laser Anneal

Author(s):
Simone Severi
Emmanuel Augendre
Bartek J. Pawlak
Pierre Eyben
Taiji Noda
Susan Felch
Annelies Falepin
Vijay Parihar
Robert Schreutelkamp
Wilfried Vandervorst
Kristin De Meyer
6 more
Publication title:
Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
912
Pub. Year:
2006
Page(from):
39
Page(to):
44
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998681 [1558998683]
Language:
English
Call no.:
M23500/912
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings The Carbon Co-Implant With Spike RTA Solution for Boron Extension

Bartek J. Pawlak, Emmanuel Augendre, Simone Severi, Pierre Eyben, Tom Janssens, Annelies Falepin, Philippe Absil, …

Materials Research Society
7 Conference Proceedings Integration of Solid Phase Epitaxial Re-Growth, Flash and Sub-Melt Laser Annealing for S/D Junctions in CMOS Digital Technology

Simone Severi, Emmanuel Augendre, Kristin De Meyer

Materials Research Society
2 Conference Proceedings Analysis and Optimization of New Implantation and Activation Mechanisms in Ultra Shallow Junction Implants Using Scanning Spreading Resistance Microscopy (SSRM)

Pierre Eyben, Simone Severi, Ray Duffy, Bartek J. Pawlak, Emmanuel Augendre, Wilfried Vandervorst

Materials Research Society
8 Conference Proceedings Channel Engineering and Junction Overlap Issues for Ultra-Shallow Junctions Formed by SPER in the 45 nm CMOS Technology Node

Severi, Simone, Henson, Kirklen, Lindsay, Richard, Lauwers, Anne, Pawlak, Bartek J., Surdeanu, Radu, Meyer, K.De

Materials Research Society
3 Conference Proceedings The Carbon Co-Implant With Spike RTA Solution for Phosphorus Extension

Bartek J. Pawlak, Ray Duffy, Emmanuel Augendre, Simone Severi, Tom Janssens, Philippe Absil, Wilfried Vandervorst, Erik …

Materials Research Society
9 Conference Proceedings Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth

Lauwers, Anne, Lindsay, Richard, Henson, Kirklen, Severi, Simone, Akheyar, Amal, Pawlak, Bartek J., Potter, Muriel de, …

Materials Research Society
4 Conference Proceedings Modeling and Experiments of Dopant Diffusion and Defects for Laser Annealed Junctions and Advanced USJ

Taiji Noda, Wilfried Vandervorst, Susan Felch, Vijay Parihar, Christa Vrancken, Thomas Y. Hoffmann

Materials Research Society
10 Conference Proceedings Effect of Varying Dwell Time During Non-Melt Laser Annealing of Boron Implanted Silicon

Daniel E. Zeenberg, Kevin S. Jones, Susan B. Felch, Vijay Parihar

Materials Research Society
5 Conference Proceedings Ultra-Shallow Junctions Formed by Co-Implantation and Sub-Melt Laser Annealing

S. B. Felch, A. Falepin, S. Seven, E. Augendre, T. Noda, V. Parihar, F. Nouri, T. Hoffinann, B. Pawlak, P. Eyben, W. …

Electrochemical Society
11 Conference Proceedings Defect Evolution During Laser Annealing

Susan B. Felch, Abhilash Mayur, Vijay Parihar, Faran Nouri, Kevin S. Jones, Daniel E. Zeenberg, Britta E. Jones

Materials Research Society
6 Conference Proceedings Modeling and Experiments of Boron Diffusion Dduring Sub-Millisecond Non-Melt Laser Annealing in Silicon

Taiji Noda, Susan Felch, Vijay Parihar, Christa Vrancken, Tom Janssens, Hugo Bender, Wilfried Vandervorst

Materials Research Society
12 Conference Proceedings Quantitative Two-Dimensional Carrier Mapping in Silicon Nanowire-Based Tunnel-Field Effect Transistors Using Scanning Spreading Resistance Microscopy

Andreas Schulze, Thomas Hantschel, Pierre Eyben, Anne Vandooren, Rita Rooyackers, Jay Mody, Anne S. Verhulst, Wilfried …

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12