Recent Results From Epitaxial Growth on Step Free 4H-SiC Mesas | 東京工業大学附属図書館文献データベース

Blank Cover Image

Recent Results From Epitaxial Growth on Step Free 4H-SiC Mesas

Author(s):

Philip G. Neudeck

Andrew J. Trunek

J. Anthony Powell

Marek Skowronski

Nabil D. Bassim

Michael A. Mastro

Richard L. Henry

Charles R. Eddy Jr.

Publication title:

Silicon carbide 2006--materials, processing and devices : symposium held April 18-20, 2006, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

911

Pub. Year:

2006

Page(from):

85

Page(to):

94

Pages:

10

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998674 [1558998675]

Language:

English

Call no.:

M23500/911

Type:

Conference Proceedings

Details

TDL ID:	ZA00046615
Series ID:	PA00000011
Conf. info. (Name):	MRS Spring Meeting : Symposium B
Conf. info. (Number):	2006
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	2006.04.18-2006.04.20

Similar Items:

1 Conference Proceedings Growth Evolution of Gallium Nitride Films on Stepped and Step-Free SiC Surfaces Eddy, Charles R. Jr., Culbertson, James C., Bassim, Nabil D., Twigg, Mark E., Holm, Ronald T., Stahlbush, Robert E., … Materials Research Society	7 Conference Proceedings Electron Microscopy Investigation of the Role of Surface Steps in the Generation of Dislocations during MOCVD Growth of GaN on 4H-SiC Bassim, N.D., Twigg, M.E., Mastro, M.A., Neudeck, P.G., Eddy, C.R.Jr., Henry, R.L., Holm, R.N., Powell, J.A., Trunek, … Trans Tech Publications
2 Conference Proceedings Relaxation Mechanism of the Defect-Free 3C-SiC Epitaxial Films Grown on Step-Free 4H SiC Mesas Du, H., Skowronski, M., Neudeck, P.G., Trunek, A.J., Spry, D.J., Powell, J.A. Trans Tech Publications	8 Conference Proceedings Confinement of Screw Dislocations to Predetermined Lateral Positions in (0001) 4H-SiC Epilayers Using Homoepitaxial Web Growth Neudeck, Philip G., Spry, David J., Trunek, Andrew J., Powell, J.Anthony, Beheim, Glenn M. Materials Research Society
3 Conference Proceedings Improved GaN Homo-Junction, Ultraviolet, Light-Emitting Diodes Grown on Step- Free 4H-SiC Mesas J. D. Caldwell, M. Mastro, K. D. Hobart, O. Glembocki, C. R. Eddy, N. Bassim, M. Tadjer, A. Holm, R. Henry, M. Ywigg, P. … Electrochemical Society	9 Conference Proceedings Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy Neudeck, P.G., Powell, J.A., Spry, D.J., Trunek, A.J., Huang, X., Vetter, W.M., Dudley, M., Skowronski, M., Liu, J. Trans Tech Publications
4 Conference Proceedings Reduction of Derects in GaN Epitaxial Films Grown Heteroepitaxially on SiC Eddy, C.R.,Jr., Bassim, N.D., Mastro, M.A., Henry, R.L., Twigg, M.E., Holm, R.T., Culbertson, J.C., Neudeck, P.G., … Trans Tech Publications	10 Conference Proceedings Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers Neudeck, P.G., Powell, J.A., Trunek, A.J., Spry, D.J. Trans Tech Publications
5 Conference Proceedings Simulation of Forescattered Electron Channeling Contrast Imaging of Threading Dislocations Penetrating SiC Surfaces Mark E. Twigg, Yoosuf N. Picard, Joshua D. Caldwell, Charles R. Eddy, Philip G. Neudeck, Andrew J. Trunek, J. Anthony … Materials Research Society	11 Conference Proceedings Lateral/vertical Homoepitaxial Growth on 4H-SiC Surfaces Controlled by Dislocations Yoosuf N. Picard, Andrew J. Trunek, Philip G. Neudeck, Mark E. Twigg Materials Research Society
6 Conference Proceedings Atomic Force Microscope Observation of Growth and Defects on As-Grown (111) 3C-SiC Mesa Surfaces Neudeck, Philip G., Trunek, Andrew J., Powell, J.Anthony Materials Research Society	12 Conference Proceedings Comparative Growth Behavior of 3C-SiC Mesa Heterofilms with and without Extended Defects Trunek, A.J., Neudeck, P.G., Powell, J.A., Spry, D.J. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12