Nano-Columnar Pore Formation in the Photo-Electrochemical Etching of n-Type 6H SiC

Nano-Columnar Pore Formation in the Photo-Electrochemical Etching of n-Type 6H SiC

Author(s):

Publication title:

Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006

Title of ser.:

Materials science forum

Ser. no.:

556-557

Pub. Year:

2007

Page(from):

741

Page(to):

744

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494422 [0878494421]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046610
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	6th
Conf. info. (Venue):	Newcastle upon Tyne, UK
Conf. info. (Date):	2006.09.00

Similar Items:

1 Conference Proceedings Columnar Pore Growth in n-Type 6H SiC Ke, Y., Yan, F., Devaty, R.P., Choyke, W.J. Trans Tech Publications	7 Conference Proceedings Novel Use of Columnar Porous Silicon Carbide Structures as Nanoimprint Lithography Stamps J.H. Leach, H. Morkoç, Y. Ke, R.P. Devaty, W.J. Choyke Trans Tech Publications
2 Conference Proceedings Porous Structure of Anodized p-Type 6H SiC Shishkin, Y., Ke, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications	8 Conference Proceedings Brillouin Spectra of Porous p-Type 6H-SiC Andrews, G.T., Young, C., Polomska, A., Clouter, M.J., Ke, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications
3 Conference Proceedings Triangular Pore Formation in Highly Doped n-Type 4H SiC Shishkin, Y., Choyke, W.J., Devaty, R.P. Trans Tech Publications	9 Conference Proceedings Columnar Morphology of Porous Silicon Carbide as a Protein-Permeable Membrane for Biosensors and Other Applications Rosenbloom, A.J., Nie, S., Ke, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications
4 Conference Proceedings Elastic Waves in Nano-Columnar Porous 4H-SiC Measured by Brillouin Scattering R.P. Devaty, M.J. Clouter, Y. Ke, W.J. Choyke Trans Tech Publications	10 Conference Proceedings CVD Epitaxial Growth of 4H-SiC on Porous SiC Substrates Shishkin, Y., Ke, Y., Yan, F., Devaty, R.P., Choyke, W.J., Saddow, S.E. Trans Tech Publications
5 Conference Proceedings A Comparison of Various Surface Finishes and the Effects on the Early Stages of Pore Formation during High Field Etching of SiC Ke, Y., Moisson, C., Gaan, S., Feenstra, R.M., Devaty, R.P., Choyke, W.J. Trans Tech Publications	11 Conference Proceedings EPR Studies of SiCISiO2 Interfaces in n-type 4H-and 6H- Oxidized Porous SIC von Bardeleben, H.J., Cantin, J.L., Mynbaeva, M., Saddow, S.E., Shishkin, Y., Devaty, R.P., Choyke, W.J. Electrochemical Society
6 Conference Proceedings Electrochemical Polishing of p-Type 4H SiC Y. Ke, F. Yan, R.P. Devaty, W.J. Choyke Trans Tech Publications	12 Conference Proceedings Isotope Effects on Hydrogen-Related Bound Exciton Spectra in SiC Bai, S., Choyke, W.J., Devaty, R.P. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12