Post-Implantation Annealing of SiC: Relevance of the Heating Rate

Post-Implantation Annealing of SiC: Relevance of the Heating Rate

Author(s):: R. Nipoti
Publication title:: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006
Title of ser.:: Materials science forum
Ser. no.:: 556-557
Pub. Year:: 2007
Page(from):: 561
Page(to):: 566
Pages:: 6
Pub. info.:: Stafa-Zuerich: Trans Tech Publications
ISSN:: 02555476
ISBN:: 9780878494422 [0878494421]
Language:: English
Call no.:: M23650
Type:: Conference Proceedings

Details

TDL ID:	ZA00046610
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	6th
Conf. info. (Venue):	Newcastle upon Tyne, UK
Conf. info. (Date):	2006.09.00

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