Electrical Characterisation of 4H-SiC Epitaxial Samples Treated by Hydrogen or Helium

Electrical Characterisation of 4H-SiC Epitaxial Samples Treated by Hydrogen or Helium

Author(s):

Publication title:

Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006

Title of ser.:

Materials science forum

Ser. no.:

556-557

Pub. Year:

2007

Page(from):

347

Page(to):

350

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494422 [0878494421]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046610
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	6th
Conf. info. (Venue):	Newcastle upon Tyne, UK
Conf. info. (Date):	2006.09.00

Similar Items:

1 Conference Proceedings Minority Carrier Lifetime Measurements in Specific Epitaxial 4H-SiC Layers by the Microwave Photoconductivity Decay L. Ottaviani, O. Palais, D. Barakel, M. Pasquinelli Trans Tech Publications	7 Conference Proceedings Behaviour of Light Induced Defect Generation and Carrier Lifetime Degradation in Solar Grade Silicon B.D. Rezgui, V. Mong-The Yen, I. Périchaud, D. Barakel, M. Pasquinelli Trans Tech Publications
2 Conference Proceedings Investigations of Defects Introduced in 4H-SiC n-Type Epitaxial Layers by Hydrogen DC Plasma Ottaviani, L., Yakimov, E., Hidalgo, P., Martinuzzi, S. Trans Tech Publications	8 Conference Proceedings Characterization of 4H-SiC pn Structures with Unstable Excess Current A.M. Strel'chuk, E.B. Yakimov, A.A. Lavrent'ev, E.V. Kalinina, A.A. Lebedev Trans Tech Publications
3 Conference Proceedings Recombination Processes in 4H-SiC pn Structures A.M. Strel'chuk, B. Berenguier, E.B. Yakimov, L. Ottaviani Trans Tech Publications	9 Conference Proceedings Improvement of the Thermal Conductivity in 4H-SiC Epitaxial Layer by Introducing Gettering Sites L. Ottaviani, M. Kazan, P.M. Masri, T. Sauvage Trans Tech Publications
4 Conference Proceedings Improvements in the Electrical Performance of High Voltage 4H-SiC Schottky Diodes by Hydrogen Annealing Wahab, Q.u., Macak, E.B., Zhang, J., Madsen, L.D., Janzen, E. Trans Tech Publications	10 Conference Proceedings Study of Defects Generated by Standard- and Plasma-Implantation of Nitrogen Atoms in 4H-SiC Epitaxial Layers L. Ottaviani, M. Kazan, S. Biondo, F. Tuomisto, F. Milesi Trans Tech Publications
5 Conference Proceedings Influence of Heating and Cooling Rates of Post-Implantation Annealing Process on Al-Implanted 4H-SiC Epitaxial Samples L. Ottaviani, S. Biondo, S. Morata, O. Palais, T. Sauvage Trans Tech Publications	11 Conference Proceedings Carrier Mobility as a Function of Temperature in as-Grown and H-Intercalated Epitaxial Graphenes on 4H-SiC M. Winters, E.B. Thorsteinsson, E.Ö. Sveinbjörnsson, H.P. Gislason, J. Hassan Trans Tech Publications
6 Conference Proceedings Electrical Characterisation of Epitaxially Grown 3C-SiC Films L.D. Jiang, L. Zhong, F. Reed, S. Taysir, M. Bosi Trans Tech Publications	12 Conference Proceedings Metastability of Electrical Properties of Dislocations in Silicon Feklisova,O.V., Yakimov,E.B., Yarykin,N.A. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12