Growth and Study of Thick 3C-SiC Epitaxial Layers Produced by Epitaxy on 6H-SiC Substrates
- Author(s):
A.A. Lebedev V.V. Zelenin P.L. Abramov E.V. Bogdanova S.P. Lebedev D.K. Nel'son B.S. Razbirin M.P. Scheglov A.S. Tregubova M. Syvajarvi R. Yakimova - Publication title:
- Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006
- Title of ser.:
- Materials science forum
- Ser. no.:
- 556-557
- Pub. Year:
- 2007
- Page(from):
- 175
- Page(to):
- 178
- Pages:
- 4
- Pub. info.:
- Stafa-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878494422 [0878494421]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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