Boron Doping during Vapor-Liquid-Solid Growth of Homoepitaxial 4H-SiC Layers

Boron Doping during Vapor-Liquid-Solid Growth of Homoepitaxial 4H-SiC Layers

Author(s):

M. Soueidan

Publication title:

Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006

Title of ser.:

Materials science forum

Ser. no.:

556-557

Pub. Year:

2007

Page(from):

65

Page(to):

68

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494422 [0878494421]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046610
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	6th
Conf. info. (Venue):	Newcastle upon Tyne, UK
Conf. info. (Date):	2006.09.00

Similar Items:

1 Conference Proceedings Optical Investigation of Cubic SiC Layers Grown on Hexagonal SiC Substrates by CVD and VLS N. Habka, V. Souliere, J.M. Bluet, M. Soueidan, G. Ferro, Y. Monteil Trans Tech Publications	7 Conference Proceedings Characterization of Homoepitaxial 4H-SiC Layer Grown from Silane/Propane System Sartel, C., Bluet, J.M., Souliere, V., El-Harrouni, I., Monteil, Y., Mermoux, M., Guillot, G. Trans Tech Publications
2 Conference Proceedings Optical Study of Ge Incorporation in Cubic SiC Layers Grown by VLS N. Habka, V. Soulière, J.M. Bluet, M. Soueidan, G. Ferro Trans Tech Publications	8 Conference Proceedings On the Quantification of Al Incorporated in SiC Material Using Particle Induced X-Ray Emission Technique M. Soueidan, B. Nsouli, G. Ferro, G. Younes Trans Tech Publications
3 Conference Proceedings Growth Kinetics of 3C-SiC on α-SiC by VLS M. Soueidan, O. Kim-Hak, G. Ferro, N. Habka, B. Nsouli Trans Tech Publications	9 Conference Proceedings Comparison of Different Metal Additives to Si for the Homoepitaxial Growth of 4H-SiC Layers by Vapour-Liquid-Solid Mechanism Abdou, F., Jacquier, C., Ferro, G., Cauwet, F., Monteil, Y. Trans Tech Publications
4 Conference Proceedings How to Grow 3C-SiC Single Domain on α-SiC(0001) by Vapor-Liquid-Solid Mechanism M. Soueidan, O. Kim-Hak, G. Ferro, P. Chaudouet, D. Chaussende, B. Nsouli, Y. Monteil Trans Tech Publications	10 Conference Proceedings Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS Sartel, C., Souliere, V., Dazord, J., Monteil, Y., El-Harrouni, I., Bluet, J.M., Guillot, G. Trans Tech Publications
5 Conference Proceedings SIMS Investigation of Ge Incorporation in 3C-SiC Layers Grown from Ge-Si Melts H. Peyre, N. Habka, V. Souliere, M. Soueidan, G. Ferro, Y. Monteil, J. Camassel Trans Tech Publications	11 Conference Proceedings Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS Sartel, C., Souliere, V., Dazord, J., Monteil, Y., El-Harrouni, I., Bluet, J.M., Guillot, G. Trans Tech Publications
6 Conference Proceedings Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxiat Growth on on-axis α-SiC (0001) at Low Temperature Soueidan, M., Ferro, G., Cauwet, F., Mollet, L., Jacquier, C., Younes, G., Monteil, Y. Trans Tech Publications	12 Conference Proceedings Electrical Characterization of Heavily Al Doped 4H-SiC Layer Grown by Vapor-Liquid-Solid Epitaxy in Al-Si Melt Godignon, P., Jacquier, C., Blanque, S., Montserrat, J., Ferro, G., Contreras, S., Zielinski, M., Monteil, Y. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12