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Plasma Etching for the Application to Low-K Dielectrics Devices

Author(s):
J.W. Lee
H.W. Kim
J.W. Han
M.S. Kim
B.D. Yoo
M.H. Kim
C.H. Lee
C.H. Lim
S.K. Hwang
C. Lee
D.J. Chung
S.G. Park
S.G. Lee
B.H. O
J. Kim
S.P. Chang
S.H. Lee
S.Y. Chai
W.I. Lee
S.E. Park
K. Kim
D.K. Choi
C.W. Chung
18 more
Publication title:
Research trends in contemporary materials science : YUCOMAT VIII : selected papers presented at the 8th Conference of the Yugoslav Materials Research Society, held in Herceg Novi, Montenegro September 4-8, 2006
Title of ser.:
Materials science forum
Ser. no.:
555
Pub. date:
2007
Vol.:
555
Page(from):
113
Page(to):
118
Pages:
6
Pub. info.:
Stafa-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494415 [0878494413]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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