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Ti-N-C Films Deposited by Ion Beam Assisted MF Twin Targets Unbalanced Magnetron Sputtering

Author(s):
Publication title:
Aerospace materials : Progress in light metals, aerospace materials and superconductors . 2006 BIMW : 2006 Beijing International Materials Week, June 25-30, 2006, Beijing, China
Title of ser.:
Materials science forum
Ser. no.:
546-549(3)
Pub. Year:
2007
Vol.:
546-549
Page(from):
1729
Page(to):
1734
Pages:
6
Pub. info.:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494323 [0878494324]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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