A Comparison of the Mechanical Properties of RF- and DC- Sputter-Deposited Cr Thin Films

A Comparison of the Mechanical Properties of RF- and DC- Sputter-Deposited Cr Thin Films

Author(s):

Publication title:

Aerospace materials : Progress in light metals, aerospace materials and superconductors . 2006 BIMW : 2006 Beijing International Materials Week, June 25-30, 2006, Beijing, China

Title of ser.:

Materials science forum

Ser. no.:

546-549(3)

Pub. Year:

2007

Vol.:

546-549

Page(from):

1695

Page(to):

1698

Pages:

4

Pub. info.:

Uetikon-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494323 [0878494324]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046603
Series ID:	PA00000012
Conf. info. (Name):	Beijing International Materials Week
Conf. info. (Number):	2006
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2006.06.25-2006.06.30

Similar Items:

1 Conference Proceedings Dependence of the Dielectric Properties of Pt/ZrO2/Si Capacitors Prepared by RF-Magnetron Sputtering on the Oxygen Partial Pressure and the Annealing … C.M. Lee, A. Park, S.Y. Park, M.W. Park Trans Tech Publications	7 Conference Proceedings Characteristics of SnO2 Thin Films Deposited by RF Magnetron Sputtering Ryu, H.W., Park, Y.J., Noh, H.S., Park, J.S. Trans Tech Publications
2 Conference Proceedings Effects of Post-Annealing on the Electrical and Optical Properties of ZnO Thin Films Grown on Al2O3 Substrates by Atomic Layer Epitaxy C.M. Lee, Y.J. Cho, H.J. Kim, W.W. Lee, H.W. Kim, C.K. Hwangbo, J.G. Lee Trans Tech Publications	8 Conference Proceedings Microstructures and Electrical Properties of Random-Oriented (Bi,La)₄Ti₃O₁₂ Thin Film Deposited by Pulsed-DC Sputtering Method M.W. Lee, S.L. Ryu, S.J. Yeom, S.Y. Kweon Trans Tech Publications
3 Conference Proceedings Characterization of MIS Capacitor of BST Thin Films Deposited on Si by RF Magnetron Sputtering Paek, S. H., Park, C. S., Won, J. H., Lee, K. S. MRS - Materials Research Society	9 Conference Proceedings DEVELOPMENT OF CRYSTALLOGRAPHIC TEXTURE IN RF SPUTTER DEPOSITED CoCrTa/Cr THIN FILMS Feng, Y. C., Laughlin, D. E., Lambeth, D. N. MRS - Materials Research Society
4 Conference Proceedings Microstructure and Electrical Properties of RF Magnetron Sputtering Derived PZT Thin Films Deposited on PbO Buffer Layer Park, C. H., Son, Y. G. Trans Tech Publications	10 Conference Proceedings Stress and Texture in Sputter Deposited Cr Films Grachev, S. Yu., Kamminga, J.-D., Janssen, G.C.A.M. Materials Research Society
5 Conference Proceedings Microstructure and Electrical Properties of RF Magnetron Sputtering Derived PZT Thin Films Deposited on Interlayer for Pyroelectric IR Sensor Park, C.H., Son, Y.G. Trans Tech Publications	11 Conference Proceedings Microstructure and Mechanical Properties of 9Cr-ODS Ferritic/Martensitic Steels by Mechanically Alloyed and Spark Plasma Sintering J. Yang, Z.M. Guo, W.W. Yang, J. Luo, C.G. Chen Trans Tech Publications
6 Conference Proceedings Electrical Properties of (Ba,Sr)TiO3 Thin Films with Self-Seed Layer Deposited by RF Magnetron Sputtering Park, C.H., Son, Y.G. Trans Tech Publications	12 Conference Proceedings SOL-GEL AND RF SPUTTERING THIN FILM COATINGS FOR FIBER OPTIC SENSOR APPLICATIONS Shahriari, M.R., Ding, J.Y., Wang, C.M., Lin, C.H., Sigel, Jr., G.H. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12