Chemical and Electrical Properties of ZnS Deposited with DEZ and H2S by Atomic Layer Deposition Method

Chemical and Electrical Properties of ZnS Deposited with DEZ and H2S by Atomic Layer Deposition Method

Author(s):

S.W. Kuk

Publication title:

Eco-materials processing and design VIII : ISEPD-8, proceedings of the 8th International Symposium on Eco-Materials Processing and Design, January 11-13, 2007, Kitakyushu, Japan

Title of ser.:

Materials science forum

Ser. no.:

544-545

Pub. Year:

2007

Page(from):

689

Page(to):

692

Pages:

4

Pub. info.:

Stafa-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494316 [0878494316]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046600
Series ID:	PA00000012
Conf. info. (Name):	ISEPD - International Symposium on Eco-Materials Processing and Design
Conf. info. (Number):	2007 : 8th
Conf. info. (Venue):	Kitakyushu, Japan
Conf. info. (Date):	2007.01.11-2007.01.13

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