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Chemical and Electrical Properties of ZnS Deposited with DEZ and H2S by Atomic Layer Deposition Method

Author(s):
S.W. Kuk
S.H. Bang
I.H. Kim
S.Y. Jeon
H.T. Jeon
H.H. Park
H.J. Chang
2 more
Publication title:
Eco-materials processing and design VIII : ISEPD-8, proceedings of the 8th International Symposium on Eco-Materials Processing and Design, January 11-13, 2007, Kitakyushu, Japan
Title of ser.:
Materials science forum
Ser. no.:
544-545
Pub. date:
2007
Vol.:
544-545
Page(from):
689
Page(to):
692
Pages:
4
Pub. info.:
Stafa-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494316 [0878494316]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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