Experimental verification of improved printability for litho-driven designs [6156-25]

Experimental verification of improved printability for litho-driven designs [6156-25]

Author(s):

Van Wingerden, J. ( Philips Research Europe (Belgium) )

Le Cam, L. ( Philips Semiconductors (France) )

Wientjes, R. ( Philips Semiconductors CTO (Netherlands) )

Benndorf, M. ( Philips Research Europe (Belgium) )

Trouiller, Y. ( CEA-LETI (France) )

Belledent. J. ( Philips Semiconductors (France) )

Morton, R. ( Philips Semiconductors (France) )

Aksenov, Y. ( Philips Research Europe (Belgium) )

3 more

Publication title:

Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6156

Pub. Year:

2006

Page(from):

61560O

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461995 [0819461997]

Language:

English

Call no.:

P63600/6156

Type:

Conference Proceedings

Details

TDL ID:	ZA00016431
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Design and process integration for microelectronic manufacturing
Conf. info. (Number):	2006 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.02.23-2006.02.24

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