Blank Cover Image

Lithography oriented DfM for 65 nm and beyond [6156-14]

Author(s):
  • Kyoh, S. ( Toshiba Corp.,Semiconductor Co. (Japan) )
  • Kotani, T. ( Toshiba Corp.,Semiconductor Co. (Japan) )
  • Kobayashi, S. ( Toshiba Corp.,Semiconductor Co. (Japan) )
  • Ikeuchi, A. ( Toshiba Corp.,Semiconductor Co. (Japan) )
  • Inoue, S. ( Toshiba Corp.,Semiconductor Co. (Japan) )
Publication title:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6156
Pub. Year:
2006
Page(from):
61560F
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461995 [0819461997]
Language:
English
Call no.:
P63600/6156
Type:
Conference Proceedings

Similar Items:

Kobayashi, S., Kyoh, S., Kotani, T., Tanaka, S., Inoue, S.

SPIE - The International Society of Optical Engineering

S. Kyoh, S. Inoue

Society of Photo-optical Instrumentation Engineers

Kotani, T., Kyoh, S., Kobayashi, S., Inazu, T., Ikeuchi, A., Urakawa, Y., Inoue, S., Morita, E., Klaver, S., Horiuchi, …

SPIE - The International Society of Optical Engineering

Kotani, T., Ichikawa, H., Kobayashi, S., Nojima, S., Izuha, K., Tanaka, S., Inoue, S.

SPIE - The International Society of Optical Engineering

Kotani, T., Ichikawa, H., Urakami, T., Nojima, S., Kobayashi, S., Oikawa, Y., Tanaka, S., Ikeuchi, A., Suzuki, K., …

SPIE-The International Society for Optical Engineering

Hsu, S.D., Eurlings, M., Hendrickx, E., Van Den Broeke, D.J., Chiou, T.-B., Chen, J.F., Laidig, T.L., Shi, X., Finders, …

SPIE - The International Society of Optical Engineering

S. Kobayashi, S. Kyoh, T. Kotani, S. Inoue

SPIE - The International Society of Optical Engineering

Luk-Pat, G. T., Miloslavsky, A., Ikeuchi, A., Suzuki, H., Kyoh, S., Izuha, K., Tseng, F., Wen, L.

SPIE - The International Society of Optical Engineering

Kyoh,S., Inoue,S., Mori,I., Irie,N., Ishii,Y., Umatate,T., Kokubo,H., Hayashi,N.

SPIE-The International Society for Optical Engineering

Kotani, T., Tanaka, S., Nojima, S., Hashimoto, K., Inoue, S., Mori, I.

SPIE - The International Society of Optical Engineering

Lu, Z., Ho, C.-C., Mason, M., Anderson, A., Mckee, R., Jackson, R., Zhu, C., Terry, M.

SPIE - The International Society of Optical Engineering

Tojo, T., Hirano, R., Tsuchiya, H., Oaki, J., Nishizaka, T., Sanada, Y., Matsuki, K., Isomura, I., Ogawa, R., Kobayashi, …

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12