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Hydrogen-free carbon thin films prepared by unbalanced magnetron sputtering [6149-100]

Author(s):
  • Xu, J. ( Northwestern Polytechnical Univ.(China) and Xi’an Institute of Technology (China) )
  • Hang, L. ( Xi’an Institute of Technology (China) )
  • Liu, W. ( Xi’an Institute of Technology (China) )
  • Fan, H. ( Northwestern Polytechnical Univ.(China) )
  • Xing, Y. ( Xi’an Institute of Technology (China) )
Publication title:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6149
Pub. Year:
2006
Page(from):
61492S
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461889 [0819461881]
Language:
English
Call no.:
P63600/6149
Type:
Conference Proceedings

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