Blank Cover Image

Modeling and simulation of silicon micromechanical electrostatic comb-drive resonator [6149-51]

Author(s):
Publication title:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6149
Pub. Year:
2006
Page(from):
61491F
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461889 [0819461881]
Language:
English
Call no.:
P63600/6149
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Fabrication of Electroplated Nickel Micromechanical Comb Resonators

Ravokilde, J.T., Yalcinkaya, A.D., Johansen, L.S., Hansen, O.

Electrochemical Society
7 Conference Proceedings Preparation of silicon coating on SiC mirror by EB-PVD [6149-84]

Zhang, Y., Zhou, Y., Han, J., Zhang, J., Yao W, Han Y

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Fault modeling of electrostatic comb-drives for MEMS

Charlot,B., Moussouris,S., Mir,S., Courtois,B.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings SIMULATION MODEL OF LPCVD SILICON NITRIDE

Wang, J.T., Zhang, S.L., Wang, Y.F., Zhang, k.Y., Xie, S.Q.

Electrochemical Society
3 Conference Proceedings Electrostatic comb drive for vertical actuation

Lee,A.P., McConaghy,C.F., Krulevitch,P.A., Campbell,E.W., Sommargren,G.E., Trevino,J.C.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Micromechanical silicon precision scale

Oja,A.S., Sillanpaa,T., Seppa,H., Kiihamaki,J., Seppala,P., Karttunen,J., Riski,K.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation

Stalford, H.L., Epp, D.S.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Design of a new MEMS-based tunable grating with electrostatic comb drive

Y. Yu, W. Yuan, J. Xu

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Assembly and testing of a grating-based electrostatic comb-drive visible microspectrometer

Heaton, L.C., Fisher, J.A., Kranz, M.S.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Electrostatic 1D microscanner with vertical combs for HD resolution display

J.-W. Cho, Y.-H. Park, Y.-C. Ko, B.-L. Lee, S.-J. Kang, S.-W. Chung, W.-K. Choi, Y.-C. Cho, S.-M. Chang, J.-H. Lee, J. …

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Modeling methodology for a CMOS-MEMS electrostatic comb

Iyer, S.V., Lakdawala, H., Mukherjee, T., Fedder, G.K.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Improved operation of micromechanical comb-drive actuators through the use of a new angled comb-finger design

Rosa,M.A., Dimitrijev,S., Harrison,H.B.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12