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Aerial image based mask defect detection in dense array structures [5853-85]

Author(s):
Kohle, R. ( Infineon Technologies AG (Germany) )
Hennig, M.
Pforr, R. ( lnfineon Technologies SC 300 GmbH and Co. OHG (Germany) )
Bubke, K.
Sczyrba, M.
Durr, A. C. ( Advanced Mask Technology Ctr. (Germany) )
1 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology XII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5853
Pub. Year:
2005
Pt.:
2
Page(from):
953
Page(to):
964
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458537 [0819458538]
Language:
English
Call no.:
P63600/5853
Type:
Conference Proceedings

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