Blank Cover Image

Validation of Nu-Flare e-beam emulation software in a simulation environment [5853-06]

Author(s):
Ritter, D. ( Sigma-C GmbH (Germany) )
Brooker, P.
Lewellen, J. ( Sigma-CAD, Inc. (USA) )
Ham, Y.-M.
Martin, P.
Cottle, R. ( Photronics, Inc. (USA) )
1 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology XII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5853
Pub. Year:
2005
Pt.:
1
Page(from):
52
Page(to):
57
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458537 [0819458538]
Language:
English
Call no.:
P63600/5853
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Application of photolithographic simulation and a mask repair system in a production environment [6283-45]

Robinson, T., Lewellen, J., Bozak, R., Lee, A. D., Brooker, P.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Interaction and balance of mask write time and design RET strategies [5853-44]

Zhang, Y., Gray, R., Nakagawa, O. S., Gupta, P., Kamberian, H., Xiao, G., Cottle, R., Progler, C.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Improved cycle time of mask repair by optimizing nanomachining with photolithographic imaging simulation [5853-90]

Brooker, P., Robinson, T., Lewellen, J., Naber, B., Bozak, R., Lee, D. A., RAVE LLC (USA)

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Simulation of GaN/InGaN micro-ring light-emitting devices (Invited Paper)

Dubikovskiy, V., Townsend, M.C., Cottle, R.D.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Impact of AFM scan artifacts on photolithographic simulation [6349-49]

Robinson, T., Lewellen, J., Lee, D. A., Brooker, P.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Validation of Radial-Filling Simulation Software

Di Scipio, W. R., Kazmer, D. O.

Society of Plastics Engineers, Inc. (SPE)
4 Conference Proceedings Exploring new high speed mask aware RET verification flows [5853-97]

Martin, P., Progler, C. J., Ham, Y.-M., Kasprowicz, B., Gray, R., Wiley, J. N., Yu, Z., Ye, J.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Beam wander experiments: terrestrial path [6303-06]

Philips R. L., Andrews L. C., Stryjewski J., Griffis B., Borbath M., Galus D., Burdge G., Green K., Kim C., Stack D., …

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Gaussian beam writing strategy: accuracy of using the shape beam simulator SELID for Gaussian beam systems

Tortai, J. H., Thiault, J., Tiron, R., Mollard, L., Haefele, S., Vychub, S., Lewellen, J., Brooker, P.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings 65nm mask CD qualification on critical features through simulation based lithography verification [5853-132]

van Adrichem, P. J. M., Valadez, J., Ziger, D., Gerold, D.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Assistance in Software Validation.

Arnould, A., Baudin, P., Collart, J.M., Pacalet, A., Raguideau, J, Schoen, D.

ESA Publications Division
12 Conference Proceedings A films based approach to intensity imbalance correction for 65 nm node c:PSM [5992-19]

Cottle, R., Sixt, P., Lassiter, M., Cangemi, M., Martin, P., Progler, C.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12