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A study of storage life extension for high performance chemically amplified resist coated blanks [5853-03]

Author(s):
Yang, S.-J.
Seo, S.-M.
Ko, S.-H.
Cha, H.-S.
Kang, G.-W.
Nam, K.-S. ( S&S TECH Corp. (South Korea) )
Seo. W.-W.
Jung, W.-K.
Cho, H.-K.
Kim, J.-M.
Choi, S.-S. ( Photronics-PKL (South Korea) )
6 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology XII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5853
Pub. Year:
2005
Pt.:
1
Page(from):
20
Page(to):
30
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458537 [0819458538]
Language:
English
Call no.:
P63600/5853
Type:
Conference Proceedings

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