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Rapid damage-free shaping of silicon carbide using reactive atom plasma (RAP) processing [6273-10]

Author(s):
Verma Y.
Chang A. K
Berrett J. W
Futtere K.
Gardopee G. J
Kelley J.
Kyler T.
Lee J.
Lyford N.
Proscia D.
Sommer P. R ( RAPT Industries, Inc. (USA) )
6 more
Publication title:
Optomechanical Technologies for Astronomy
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6273
Pub. Year:
2006
Pt.:
1
Page(from):
62730B
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463388 [0819463388]
Language:
English
Call no.:
P63600/6273
Type:
Conference Proceedings

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