MEMS acoustic sensor using PMN-PT single-crystal diaphragm [6374A-09]
- Author(s):
- Lee, S. Q.
- Kim, H. J.
- Park, K. H. ( Electronics and Telecommunications Research Institute (South Korea) )
- Hong, Y. K.
- Moon, K. S. ( San Diego State Univ. (USA) )
- Publication title:
- Optomechatronic Actuators, Manipulation, and Systems Control
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6374
- Pub. Year:
- 2006
- Page(from):
- 637409
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464729 [0819464724]
- Language:
- English
- Call no.:
- P63600/6374
- Type:
- Conference Proceedings
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