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All optically driven MEMS deformable device via a photodetector array [6368-04]

Author(s):
Khoury, J.
Vaccaro, K.
Woods, C. L. ( Air Force Lab. (USA) )
Haji-saeed, B. ( Univ. of Massachusetts, Lowell (USA) )
Sengupta,S. K. ( Univ. of Massachusetts, Lowell (USA) and Solid State Scientific Corp (USA) )
Armiento, C.
Goodhue, W. D. ( Univ. of Massachusetts, Lowell (USA) )
Kierstead, J.
Davis, A. ( Solid State Scientific Corp. (USA) )
Clark, W. ( Anteon Corp. (USA) )
5 more
Publication title:
Optoelectronic Devices: Physics, Fabrication, and Application III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6368
Pub. date:
2006
Page(from):
636804
Page(to):
636904
Pages:
101
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464668 [081946466X]
Language:
English
Call no.:
P63600/6368
Type:
Conference Proceedings

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