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Silicon nanophotonics using deep-UV lithography (Invited Paper) [6351-99]

Author(s):
Bienstman, P.
Van Loere, F.
Taillaert, D.
Dumon, P.
Bogaerts, W.
De vos, K.
Van Thourhout, D.
Baets, R. ( Ghent Univ. (Belgium) )
3 more
Publication title:
Passive Components and Fiber-based Devices III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6351
Pub. date:
2006
Pt.:
2
Page(from):
63512M
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464460 [0819464465]
Language:
English
Call no.:
P63600/6351
Type:
Conference Proceedings

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