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More evolved PGSD (proximity gap suction developer) for controlling movement of dissolution products [6349-175]

Author(s):
Sakurai, H.
Oppata, Y.
Murano, K.
Sakai, M.
Itoh, M.
Watanabe, H. ( Toshiba Corp. (Japan) )
Funakoshi, H.
Ooishi, K.
Okamoto, Y.
Kaneda, M.
Kamei, S. ( Tokyo Electron Kyushu Ltd. (Japan) )
Hayashi, N. ( Dai Nippon Printing Co., Ltd. (Japan) )
7 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
2
Page(from):
63494J
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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