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Multi-layer resist system for 45-nm-node and beyond: Part II [6349-121]

Author(s):
Fujimura, Y.
Morimoto, J.
Manoshiro, A.
Shimizu, M.
Takamizawa, H. ( Dai Nippon Printing Co., Ltd. (Japon) )
Hashimoto, M.
Shiratori, H.
Horii, K.
Yokoya, Y.
Ohkubo, Y. ( HOYA Corp. (Japan) )
Enomoto, T.
Sakaguchi, T.
Nagai, M. ( Nissan Chemical Industries (Japan) )
8 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
2
Page(from):
634936
Page(to):
634936
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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