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NIL template making and imprint evaluation [6349-85]

Author(s):
Yoshida, Y.
Kobiki, A.
Hiraka, T.
Yusa, S.
Sasaki, S.
Itoh, K.
Toyama, N.
Kurihara, M.
Mohri, H.
Hayashi, N. ( Dai Nippon Printing Co., Ltd. (Japan) )
5 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
1
Page(from):
63492C
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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