Sensitivity of a variable threshold model toward process and modeling parameters [6349-44]
- Author(s):
Saied, M. ( Freescale Semiconductor, Inc. (France) ) Foussadier, F. ( STMicroelectronics (France) ) Trouiller, Y. ( LETI-CEA (France) ) Belledent, J. ( Philips Semiconductors (France) ) Lucas, K. ( Freescale Semiconductor, Inc. (France) ) Schanen, I. ( IMEP (France) ) Borjon, A. Couderc, C. ( Philips Semiconductors (France) ) Gardin, C. ( Freescale Semiconductor, Inc. (France) ) LeCam, L. Rody, Y. ( Philips Semiconductors (France) ) Sundermann, F. Urbani, J.-C. ( STMicroelectronics (France) ) Yesilada, E. ( Freescale Semiconductor, Inc. (France) ) - Publication title:
- Photomask Technology 2006
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6349
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 634919
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464446 [0819464449]
- Language:
- English
- Call no.:
- P63600/6349
- Type:
- Conference Proceedings
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