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In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode [6345-49]

Author(s):
Bosseboeuf, A.
Breluzeau, C.
Parrain, F.
Coste, P.
Gilles, J.-P.
Megherbi, S.
Le Roux, X. ( Institut d’Electronique Fondamentale, CNRS, Univ. Paris Sud Xl (France) )
2 more
Publication title:
Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 19-22 June 2006, Ancona, Italy
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6345
Pub. Year:
2006
Page(from):
63451D
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464217 [081946421X]
Language:
English
Call no.:
P63600/6345
Type:
Conference Proceedings

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