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Study on a symmetrically supported electrostatic actuated micro-plafform [6343-139]

Author(s):
Publication title:
Photonics North 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6343
Pub. Year:
2006
Pt.:
2
Page(from):
63433Y
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464286 [0819464287]
Language:
English
Call no.:
P63600/6343
Type:
Conference Proceedings

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