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In situ infrared absorption spectroscopy for thin film growth by atomic layer deposition (Invited Paper) [6325-16]

Author(s):
Publication title:
Physical Chemistry of Interfaces and Nanomaterials V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6325
Pub. date:
2006
Page(from):
63250G
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464040 [081946404X]
Language:
English
Call no.:
P63600/6325
Type:
Conference Proceedings

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