Pellicle-induced aberrations and apodization in hyper NA optical lithography [6283-115]

Pellicle-induced aberrations and apodization in hyper NA optical lithography [6283-115]

Author(s):

Bubke, K. ( Advanced Mask Technology Ctr. GmbH and Co. KG (Germany) )
Alles, B ( Technische Univ. Munchen (Germany) )
Cotte, E.
Sczyrba, M.
Pierrat, C. ( Advanced Mask Technology Ctr. GmbH and Co. KG (Germany) )

Publication title:

Photomask and Next-Generation Lithography Mask Technology XIII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6283

Pub. date:

2006

Pt.:

1

Page(from):

628318

Page(to):

628318

Pages:

1

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819463586 [0819463582]

Language:

English

Call no.:

P63600/6283

Type:

Conference Proceedings

Details

TDL ID:	ZA00016290
Series ID:	PA00000029
Conf. info. (Name):	Photomask and next-generation lithography mask technology
Conf. info. (Number):	2006 : 13th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2006.04.18-2006.04.20

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