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Dynamic characteristics and testing techniques of microstructures under high load [6280-130]

Author(s):
Publication title:
Third International Symposium on Precision Mechanical Measurements
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6280
Pub. Year:
2006
Pt.:
2
Page(from):
62803L
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463517 [0819463515]
Language:
English
Call no.:
P63600/6280
Type:
Conference Proceedings

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